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To read the entire paper for this submission, download and view the PDF attachment on this document.
Category: Advanced Control Systems
Author: Johannes Klöckner, Steohan Zschäck, Felix Balzer, Brandon Percle
Challenge: Developing a nanomeasuring machine (NPMM-200) with a measuring volume of 200 x 200 x 25 mm³ that must perform signal acquisition and preprocessing at a high frequency with extremely low latency for subnanometer resolution, high-precision moving stage control, and nanometer uncertainty.
Solution: Using three modular, scalable NI PXI systems and 11 field-programmable gate array (FPGA) modules to complete the signal- and data-processing unit and easily integrate innovative metrological and control concepts.
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